ウシオ電機は9日、独アーヘンにある次世代半導体露光用EUV光源の研究開発会社、XTREME technologies GmbHの活動を停止すると発表した。今後はEUV光源事業を日本国内に集約したうえで、検査・開発向けの事業を継続していく。
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